Heidelberg μPG 501 Tabletop Maskless Aligner System

We are happy to announce that we now offer mask writing at CMS with the Heidelberg µPG 501 Maskless Aligner System. The maximum substrate size is 7″, with a maximum write area of 5″. The aligner uses a wavelength of 375 nm, and the minimum feature size printable is 1 µm.

Mask writer

Mask writer

For more information, see the data sheet (HIMT Fact Sheet µPG 501) or contact us.

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